IBA study of SiGe/SiO2 nanostructured multilayers
- 25 January 2014
- journal article
- conference paper
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 331, 89-92
Abstract
No abstract availableKeywords
Funding Information
- European Regional Development Fund (PTDC/FIS/70194/2006)
- Portuguese Foundation for Science and Technology (FCT)
- European Cost Actions (MP0903, MP0901)
- ANNA_TA_UC9_RP006 proposal (026134-RII3)
- FCT
- POPH (SFRH/BD/45410/2008)
- Spanish CSIC JAE-DOC-070/01
- Thin Film Laboratory
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