Abstract
We report on the characteristics of Ti superconducting transition-edge sensors (TES) baked in air at different temperatures from 100 °C to 140 °C. The critical temperature (T C ) of Ti bare films is decreased by about 40% after baking at 140 °C for 30 hours, which might be due to the oxidation, lowering its effective thickness. Ti TES device, baked at 120 °C for 10 hours, exhibits a T C of 257 mK, lowered by ∼100 mK, while its temperature sensitivity nearly keeps constant. The measured thermal conductance is ∼500 pW/K, more than 3 times lower than its original value. We demonstrate that baking in air is a simple way to get the required performance by depressing T C of superconducting Ti TESs.
Funding Information
  • National Key R&D Program of China (2017YFA0304003, 2018YFA0404701)
  • National Natural Science Foundation of China (11673073, U1831202, U1931123, 11773083, 11873099)
  • CAS (QYZDJ-SSW-SLH043, GJJSTD20180003)
  • Government of Jiangsu Province (BRA2020411)
  • CAS

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