Introduction to magnetron sputtering
Authors:
- Jon Tomas GudmundssonJGJon Tomas Gudmundsson
- Daniel LundinDLDaniel Lundin
- 1 January 2020
- book chapter
- Published by Elsevier
- p. 1-48
Abstract
No abstract availableKeywords
This publication has 118 references indexed in Scilit:
- Experimental study of a pre-ionized high power pulsed magnetron dischargePlasma Sources Science and Technology, 2007
- Reactive pulsed magnetron sputtering process for alumina filmsJournal of Vacuum Science & Technology A, 2000
- Ionization of sputtered material in a planar magnetron dischargeJournal of Vacuum Science & Technology A, 2000
- ENERGY DEPENDENCE OF ION-INDUCED SPUTTERING YIELDS FROM MONATOMIC SOLIDS AT NORMAL INCIDENCEAtomic Data and Nuclear Data Tables, 1996
- Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solidsComputer Physics Communications, 1988
- Unbalanced magnetron ion-assisted deposition and property modification of thin filmsJournal of Vacuum Science & Technology A, 1986
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- EXCITATION OF ELECTRONS IN SOLIDS BY RELATIVELY SLOW ATOMIC PARTICLESSoviet Physics Uspekhi, 1967
- Magnetic Field Effects on an Abnormal Truncated Glow Discharge and Their Relation to Sputtered Thin-Film GrowthJournal of Applied Physics, 1963
- Die glimmentladung bei niedrigem druck zwischen koaxialen zylindern in einem axialen magnetfeldPhysica, 1936