High precision x-ray metrology
Authors:
- P. SeyfriedPSP. Seyfried
- P. BeckerPBP. Becker
- D. WindischDWD. Windisch
- 1 January 1988
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 10 (1) , 35-42
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Determination of silicon unit cell parameters by precision measurements of Bragg plane spacingsZeitschrift für Physik B Condensed Matter, 1984
- X-ray interferometer calibration of microdisplacement transducersJournal of Physics E: Scientific Instruments, 1983
- Absolute Measurement of the (220) Lattice Plane Spacing in a Silicon CrystalPhysical Review Letters, 1981
- X-Ray to Visible Wavelength RatiosPhysical Review Letters, 1973
- Principles and design of Laue-case X-Ray interferometersThe European Physical Journal A, 1965