Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS
Authors:
- L. LapeyreLLL. Lapeyre
- C. HainCHC. Hain
- P. SturmPSP. Sturm
- J. MetzgerJMJ. Metzger
- A. BorzìABA. Borzì
- K. WieczerzakKWK. Wieczerzak
- P. RaynaudPRP. Raynaud
- J. MichlerJMJ. Michler
- T. NelisTNT. Nelis
Open Access
- 1 May 2023
- journal article
- research article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 464
Abstract
No abstract availableKeywords
Funding Information
- Innosuisse - Schweizerische Agentur für Innovationsförderung
- European Commission (E!114277)
- European Commission (50631.1 INNO-ENG)
- H2020 Marie Skłodowska-Curie Actions
- Horizon 2020
- HORIZON EUROPE Framework Programme (754364)
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