Structure and chemistry of silicon nitride and silicon carbonitride thin films deposited from ethylsilazane in ammonia or hydrogen

Authors:
  • YBY. W. Bae
    Y. W. Bae
  • HDH. Du
    H. Du
  • BGB. Gallois
    B. Gallois
  • KGK. E. Gonsalves
    K. E. Gonsalves
  • BWB. J. Wilkens
    B. J. Wilkens
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