Growth and characterization of ultrathin nitrided silicon oxide films

Authors:
  • EGE. P. Gusev
    E. P. Gusev
  • HLH.-C. Lu
    H.-C. Lu
  • EGE. L. Garfunkel
    E. L. Garfunkel
  • TGT. Gustafsson
    T. Gustafsson
  • MGM. L. Green
    M. L. Green
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Abstract
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