In Vacuo Studies on the Mechanism of Inherently Area-Selective Atomic Layer Deposition of Iridium
Open Access
- 31 August 2025
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
Abstract
No abstract availableFunding Information
- Luonnontieteiden ja Tekniikan Tutkimuksen Toimikunta (338707)
- Jane ja Aatos Erkon S??ti?
- NextGenerationEU
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