Conductivity-based contact sensing for probe arrays in dip-pen nanolithography
Authors:
- 21 July 2003
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 83 (3) , 581-583
Abstract
This letter reports a contact sensing method for dip-pen nanolithography which functions by monitoring the conductivity between the lithography probe and the substrate. Experimental results show that this method has high sensitivity and is suitable for dip-pen nanolithography applications with large probe arrays.Keywords
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