A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section
Authors:
- Seung-Joon PaikSPSeung-Joon Paik
- Jongpal KimJKJongpal Kim
- Sangjun ParkSPSangjun Park
- Setae KimSKSetae Kim
- Chiwan KooCKChiwan Koo
- Seung-Ki LeeSLSeung-Ki Lee
- Dongil “Dan” ChoDongil “Dan” Cho
- 15 January 2003
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 42 (Part 1, No) , 326-332