Recent advances in laser micromachining for semiconductor and microfluidic applications
Authors:
- Robert F. HainseyRHRobert F. Hainsey
- Andrew E. HooperAHAndrew E. Hooper
- Edward J. SwensonESEdward J. Swenson
- Michael S. NashnerMNMichael S. Nashner
- 1 January 2006
- conference paper
- Published by Laser Institute of America
- Vol. 2006 (1) , M701
Abstract
Recent advances in fiber amplified lasers, modelocked technology, and harmonic conversion not only have enabled improvements in traditional micromachining applications but also have opened the door for laser processing in new areas. This paper will review recent work with UV diode-pumped solid state lasers, picosecond lasers and master oscillator fiber power amplifier systems in processing semiconductor, metal, dielectric and polymer materials for such diverse applications as memory repair, microfluidics, solar cells, and MEMS.Keywords
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