Electrical and mechanical properties of layered gold–chromium thin films for ohmic contacts in RF-MEMS switches
Authors:
- V. MulloniVMV. Mulloni
- R. BartaliRBR. Bartali
- S. ColpoSCS. Colpo
- F. GiacomozziFGF. Giacomozzi
- N. LaidaniNLN. Laidani
- B. MargesinBMB. Margesin
- 25 July 2009
- journal article
- research article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 163 (3) , 199-203
Abstract
No abstract availableKeywords
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