In-plane excitation of thin silicon cantilevers using piezoelectric thin films
- 29 October 2007
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 91 (18) , 183510
Abstract
This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.Keywords
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