Miniaturised optical encoder for ultra precision metrology systems
Authors:
- J. CarrJCJ. Carr
- M.Y.P. DesmulliezMDM.Y.P. Desmulliez
- 1 July 2009
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 33 (3) , 263-267
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Integration of grating-image-type encoder using Si micromachiningSensors and Actuators A: Physical, 2002
- A compact optical encoder with micromachined photodetectorJournal of Optics A: Pure and Applied Optics, 2001