Studies of CO2 laser peeling of glass substrates
Authors:
- H Y ZhengHZH Y Zheng
- T LeeTLT Lee
- 23 September 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (11) , 2093-2097
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Precision glass machining, drilling and profile cutting by short pulse lasersThin Solid Films, 2005
- Polarisation-independence of femtosecond laser machining of fused silicaApplied Surface Science, 2004
- Laser cutting of thick ceramic substrates by controlled fracture techniqueJournal of Materials Processing Technology, 2003
- Experimental observations and analysis of CO2 laser-induced microcracking of glassJournal of Applied Physics, 1995