Self-Assembled Monolayer Islands Masked Chemical Etching for Broad-Band Antireflective Silicon Surfaces

This publication has 55 references indexed in Scilit:

• Biomimetic Antireflective Si Nanopillar Arrays
  Small, 2008
• Phase Separation of a Mixed Self-Assembled Monolayer Prepared via a Stepwise Method
  Langmuir, 2006
• Roselike Microstructures Formed by Direct In Situ Hydrothermal Synthesis: From Superhydrophilicity to Superhydrophobicity
  Chemistry of Materials, 2005
• Antireflection sub-wavelength gratings fabricated by spin-coating replication
  Microelectronic Engineering, 2005
• Self‐Organized Complex Patterning: Langmuir–Blodgett Lithography
  Advanced Materials, 2004
• Subwavelength-structured antireflective surfaces on glass
  Thin Solid Films, 1999
• Separating Octadecyltrimethoxysilane Hydrolysis and Condensation at the Air/Water Interface through Addition of Methyl Stearate
  The Journal of Physical Chemistry B, 1999
• Growth of Self-Assembled n-Alkyltrichlorosilane Films on Si(100) Investigated by Atomic Force Microscopy
  Langmuir, 1995
• The black silicon method II:The effect of mask material and loading on the reactive ion etching of deep silicon trenches
  Microelectronic Engineering, 1995
• Pyramid-array surface-relief structures producing antireflection index matching on optical surfaces
  Journal of the Optical Society of America A, 1991