In-flight particle characteristics in a DC–RF hybrid plasma flow system
Authors:
- Kohtaro KawajiriKKKohtaro Kawajiri
- Hideya NishiyamaHNHideya Nishiyama
- 1 May 2006
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 506-507, 660-664
Abstract
No abstract availableFunding Information
- Japan Society for the Promotion of Science
- Ministry of Education, Culture, Sports, Science and Technology
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