Lens aberration compensation in interference microscopy
Authors:
- Rong SuRSRong Su
- Matthew ThomasMTMatthew Thomas
- Mingyu LiuMLMingyu Liu
- Jakub DrsJDJakub Drs
- Yves BellouardYBYves Bellouard
- Christof PrussCPChristof Pruss
- Jeremy CouplandJCJeremy Coupland
- Richard LeachRLRichard Leach
Open Access
- 1 May 2020
- journal article
- research article
- Published by Elsevier in Optics and Lasers in Engineering
- Vol. 128
Abstract
No abstract availableKeywords
Funding Information
- University of Nottingham
- École Polytechnique Fédérale de Lausanne
- European Metrology Programme for Innovation and Research (15SIB01)
- Engineering and Physical Sciences Research Council (EP/L022494/1, EP/M008983/1)
This publication has 33 references indexed in Scilit:
- Manufacturing and measurement of freeform opticsCIRP Annals, 2013
- Bandwidth characteristics and comparisons of surface texture measuring instrumentsMeasurement Science and Technology, 2010
- Holography, tomography and 3D microscopy as linear filtering operationsMeasurement Science and Technology, 2008
- Surface measurement errors using commercial scanning white light interferometersMeasurement Science and Technology, 2007
- Dispersion error in white-light Linnik interferometers and its implications for evaluation proceduresApplied Optics, 2001
- Imaging of random surfaces and inverse scattering in the Kirchoff approximationWaves in Random Media, 1998
- Three‐dimensional image formation in confocal microscopyJournal of Microscopy, 1990
- Three-dimensional imaging by a microscopeJournal of the Optical Society of America A, 1985
- Three-dimensional structure determination of semi-transparent objects from holographic dataOptics Communications, 1969
- Generalized Aperture and the Three-Dimensional Diffraction ImageJournal of the Optical Society of America, 1964