A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement
Authors:
- Tong GuoTGTong Guo
- Long MaLMLong Ma
- Jian ZhaoJZJian Zhao
- Dante J. Dorantes-GonzalezDDDante J. Dorantes-Gonzalez
- Xing FuXFXing Fu
- Xiaotang HuXHXiaotang Hu
- 1 September 2011
- journal article
- Published by Elsevier in Optics and Lasers in Engineering
- Vol. 49 (9-10) , 1124-1130
Abstract
No abstract availableKeywords
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