A MEMS Photoacoustic Detector of Terahertz Radiation for Chemical Sensing
Authors:
- N. GlauvitzNGN. Glauvitz
- S. BlazevicSBS. Blazevic
- R. CoutuRCR. Coutu
- M. KistlerMKM. Kistler
- I.R. MedvedevIMI.R. Medvedev
- D. PetkieDPD. Petkie
Open Access
- 1 January 2012
- journal article
- Published by Elsevier in Procedia Engineering
- Vol. 47, 730-733
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Photoacoustic Gas Analysis Using Interferometric Cantilever MicrophoneApplied Spectroscopy Reviews, 2007
- High sensitivity in gas analysis with photoacoustic detectionMicrochemical Journal, 2004
- Photoacoustic spectroscopyReview of Scientific Instruments, 1983