Robust ultra-thin RuMo alloy film as a seedless Cu diffusion barrier
Authors:
- Kuo-Chung HsuKHKuo-Chung Hsu
- Dung-Ching PerngDPDung-Ching Perng
- Yi-Chun WangYWYi-Chun Wang
- 1 March 2012
- journal article
- Published by Elsevier in Journal of Alloys and Compounds
- Vol. 516, 102-106
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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