Optimum design considerations for silicon piezoresistive pressure sensors
Authors:
- Yozo KandaYKYozo Kanda
- Akio YasukawaAYAkio Yasukawa
- 1 July 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 62 (1-3) , 539-542
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Design Considerations for Silicon Circular Diaphragm Pressure SensorsJapanese Journal of Applied Physics, 1982
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