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Power dissipation mechanisms in radio-frequency driven silane discharges: The influence of discharge geometry
Home
Publications
Power dissipation mechanisms in radio-frequency driven silane discharges: The influence of discharge geometry
Power dissipation mechanisms in radio-frequency driven silane discharges: The influence of discharge geometry
Authors:
DM
D. Mataras
D. Mataras
SC
S. Cavadias
S. Cavadias
DR
D. Rapakoulias
D. Rapakoulias
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1 May 1993
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 11
(3)
,
664-671
DOI:
10.1116/1.578788
Abstract
No abstract available
Cited
Cited by 19 articles
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