All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining
Authors:
- M. HoffmannMHM. Hoffmann
- P. KopkaPKP. Kopka
- E. VogesEVE. Voges
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 5 (1) , 46-51
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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