Low pull-in voltage graphene electromechanical switch fabricated with a polymer sacrificial spacer
Authors:
- 21 July 2014
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 105 (3) , 033103
Abstract
A simple bottom-up procedure using a polymer sacrificial spacer is presented to fabricate graphene electromechanical contact switch devices without using acid etching. Low pull-in voltage of below 2 V is achieved with good consistency on a run-to-run basis, which is compatible with the conventional, complementary metal-oxide-semiconductor circuit requirements. In addition, the formation of carbon-gold bonds at the contact position is proposed as another important mechanism for the irreversible switch—other than the well-known irreversible static friction.Keywords
Funding Information
- Japan Society for the Promotion of Science (25220904)
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