Uncooled micro-bolometer based on amorphous germanium film
Authors:
- A. TorresATA. Torres
- Roberto Ambrosio LazaroRoberto Ambrosio Lazaro
- A. KosarevAKA. Kosarev
- M.L. Garcı&#x;a CruzMCM.L. Garcı&#x;a Cruz
- R. AmbrosioRAR. Ambrosio
- 1 November 2003
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 329 (1-3) , 179-183
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- IR uncooled bolometers based on amorphous Ge/sub x/Si/sub 1-x/O/sub y/ on silicon micromachined structuresJournal of Microelectromechanical Systems, 2002
- High-performance infrared detectors at Sofradir2000
- Amorphous Silicon Microbolometer TechnologyMRS Proceedings, 2000
- Growth and properties of semiconductor bolometers for infrared detection1995