Silicon Carbonitride Films Produced by Remote Hydrogen Microwave Plasma CVD Using a (Dimethylamino)dimethylsilane Precursor
Authors:
- 31 January 2005
- journal article
- research article
- Published by Wiley in Chemical Vapor Deposition
- Vol. 11 (1) , 44-52
Abstract
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This publication has 1 reference indexed in Scilit:
- Comparisons of glow discharge polymerization between hexamethyldisilazane and trimethylsilyldimethylamineJournal of Polymer Science: Polymer Chemistry Edition, 1983