Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating
Authors:
- Y.S. JuY.S. Ju
- K.E. GoodsonKGK.E. Goodson
Open Access
- 1 February 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 339 (1-2) , 160-164
Abstract
No abstract availableKeywords
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