A Transient FDTD Method for Fully Bidirectional Electromagnetic--Thermal--Mechanical Multiphysics Coupling With Moving Mesh for MEMS

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Abstract
To conduct a detailed investigation of the bidirectional multiphysics interactions among electromagnetic, thermal, and mechanical fields, this work proposes a finite-difference time-domain (FDTD) framework that incorporates electromagnetic–thermal–mechanical coupling (ETMC) together with moving-mesh capability. The formulation consistently accounts for pairwise interactions among the three fields, namely, electromagnetic–thermal, thermal–mechanical, and deformation-induced mechanical–electromagnetic coupling (MEC), thereby establishing a fully closed-loop coupling mechanism. The proposed framework allows flexible sequencing and combination of the coupling processes according to specific modeling requirements. All governing equations are solved in the time domain within a unified FDTD scheme, enabling direct tracking of temporal evolution and cross-field feedback while maintaining strong physical consistency and numerical accuracy. The accuracy and effectiveness of the bidirectional ETMC-FDTD method are validated through numerical simulations of a rectangular silicon block and a micro-electromechanical system (MEMS) micromirror. The results demonstrate its strong potential for applications in integrated circuits and radio frequency engineering.
Funding Information
  • National Natural Science Foundation of China (62471002)
  • National Natural Science Foundation of China (U22A2017)
  • National Natural Science Foundation of China (62531001)
  • Anhui Provincial Department of Science and Technology (2025AHGXZK50100)
  • Natural Science Foundation of Anhui Province (2508085Y037)
  • Anhui Province Key Technological Tasks for Manufacturing through the Open Competition Mechanism (JB25062)
  • Anhui Province Science and Technology Innovation Tackle Plan Project (202423k09020033)
  • Anhui Province Science and Technology Innovation Tackle Plan Project (202523j08050019)
  • State Key Laboratory of Radio Frequency Heterogeneous Integration through the Open Scientific Research Program (KF2024001)

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