Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
Authors:
- Jürgen WibbelerJWJürgen Wibbeler
- Günter PfeiferGPGünter Pfeifer
- Michael HietscholdMHMichael Hietschold
- 1 November 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 71 (1-2) , 74-80
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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