Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor

Authors:
  • YLYahui Li
    Yahui Li
  • KWKai Wang
    Kai Wang
  • LLLiyan Lai
    Liyan Lai
  • XXXiaoxue Xu
    Xiaoxue Xu
  • BSBin Sun
    Bin Sun
  • ZYZhuoqing Yang
    Zhuoqing Yang
  • GDGuifu Ding
    Guifu Ding

Abstract
No abstract available
Funding Information
  • National Natural Science Foundation of China (61974088)
  • National Key Research and Development Program of China (2020YFB2008500)
  • Shenzhen Municipal Fundamental Research Program (JCYJ20170413164102261)

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