Fabrication of free standing structure using single step electrochemical etching in hydrofluoric acid
Authors:
- H. OhjiHOH. Ohji
- P.J. TrimpPTP.J. Trimp
- P.J. FrenchPFP.J. French
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
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