Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size
Authors:
- Marco AbbarchiMAMarco Abbarchi
- Meher NaffoutiMNMeher Naffouti
- Mario LodariMLMario Lodari
- Marco SalvalaglioMSMarco Salvalaglio
- Rainer BackofenRBRainer Backofen
- Thomas BotteinTBThomas Bottein
- Axel VoigtAVAxel Voigt
- Thomas DavidTDThomas David
- Jean-Benoît ClaudeJCJean-Benoît Claude
- Mohammed BouabdellaouiMBMohammed Bouabdellaoui
- Abdelmalek BenkouiderABAbdelmalek Benkouider
- Ibtissem FrajIFIbtissem Fraj
- 1 April 2018
- journal article
- research article
- Published by Elsevier in Microelectronic Engineering
- Vol. 190, 1-6
Abstract
No abstract availableKeywords
Funding Information
- Alexander von Humboldt-Stiftung
- EMMAG
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