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Chemical amplification resists: History and development within IBM
Home
Publications
Chemical amplification resists: History and development within IBM
Chemical amplification resists: History and development within IBM
Author:
HI
H. Ito
H. Ito
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1 January 2000
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 44
(1.2)
,
119-130
DOI:
10.1147/rd.441.0119
Abstract
No abstract available
Cited
Cited by 42 articles
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