Synthesis of spherical CeO2 nanoparticles via flame spray pyrolysis for high-performance chemical mechanical polishing
Authors:
- Zhiyang XuZXZhiyang Xu
- Jiechao JiangJJJiechao Jiang
- Wenmiao JiangWJWenmiao Jiang
- Jie JuJJJie Ju
- Hao JiangHJHao Jiang
- Yanjie HuYHYanjie Hu
- Chunzhong LiCLChunzhong Li
- 25 May 2026
- journal article
- Published by Elsevier in Journal of Rare Earths
Abstract
No abstract availableFunding Information
- Science and Technology Commission of Shanghai Municipality (22dz1205900)
- Special Project for Research and Development in Key areas of Guangdong Province (2023B0101200007)
- Fundamental Research Funds for the Central Universities
- National Natural Science Foundation of China (22108079)
- National Natural Science Foundation of China (22378128)
- National Natural Science Foundation of China (U22B20143)
- National Natural Science Foundation of China (22408229)
- National Natural Science Foundation of China (U22A20429)
- National University's Basic Research Foundation of China
This publication has 45 references indexed in Scilit:
- Unprecedented developed composite polishing system to achieve atomic surface integrating rough and fine polishing using a novel hyper-conjugated pad through controlling the temperature of a proposed green slurryAdvanced Composites and Hybrid Materials, 2025
- Dual impact of Nd3+ doping on CeO2 abrasives: enhancing chemical and mechanical effects in chemical–mechanical polishingSurface Science and Technology, 2025
- Influence of Cerium Oxide Abrasive Particle Morphologies on Polishing PerformanceCrystal Research and Technology, 2024
- Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigationsApplied Surface Science, 2023
- Doping strategy on properties and chemical mechanical polishing performance of CeO2 Abrasives: A DFT assisted experimental studyApplied Surface Science, 2023
- Development of carbon sphere/ceria (CS/CeO2) heterostructured particles and their applications to functional abrasives toward photochemical mechanical polishingApplied Surface Science, 2022
- Meso-silica/Erbium-doped ceria binary particles as functionalized abrasives for photochemical mechanical polishing (PCMP)Applied Surface Science, 2021
- An XPS investigation of (La 2 O 3 )
1‐
x
(CeO 2 )
2
x
(ZrO 2 ) 2 compoundsSurface and Interface Analysis, 2012
- Tight-binding quantum chemical molecular dynamics simulation of mechano-chemical reactions during chemical–mechanical polishing process of SiO2 surface by CeO2 particleApplied Surface Science, 2005
- Chemical processes in glass polishingJournal of Non-Crystalline Solids, 1990