Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
Author:
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1) , 157-176
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A surface micromachined silicon accelerometer with on-chip detection circuitrySensors and Actuators A: Physical, 1994
- A review of silicon microphonesSensors and Actuators A: Physical, 1994
- Amplitude-modulated electro-mechanical feedback system for silicon condenser microphonesJournal of Micromechanics and Microengineering, 1992
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Vibrations of a System with a Finite or an Infinite Number of ResonancesThe Journal of the Acoustical Society of America, 1958