Modelling and validation of air damping in perforated gold and silicon MEMS plates
Authors:
- Giorgio De PasqualeGiorgio De Pasquale
- Timo VeijolaTVTimo Veijola
- Aurelio SomàAurelio Somà
- 26 November 2009
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 20 (1)
Abstract
No abstract availableKeywords
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