Influence of the beam scan direction during focused electron beam induced deposition of 3D nanostructures
Authors:
- Tristan BretTBTristan Bret
- Ivo UtkeIUIvo Utke
- Patrik HoffmannPHPatrik Hoffmann
- 1 March 2005
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 78-79, 307-313
Abstract
No abstract availableKeywords
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