Photoconductivity of Hf-based binary metal oxide systems
- 1 December 2008
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 104 (11) , 114103
Abstract
To explore the possibility of bandgap engineering in binary systems of oxide insulators we studied photoconductivity of nanometer-thin Hf oxide layers containing different concentrations of cations of different sorts (Si, Al, Sr, or Ce) deposited on (100)Si. The lowest bandgap of the Hf:Al oxide is close to the value 6–6.2 eV of elemental amorphous and insensitive to the Al content for concentrations of Al exceeding 36%. This result suggests that the Al oxide subnetwork with the largest bandgap preserves this energy width while development of a narrower gap of is prevented possibly by dilution of the second cation subnetwork. When Ce is admixed to an intermediate bandgap value (between the and bandgap widths) of is observed for all concentrations of Ce, suggesting that the electronic structure of both elemental oxide subnetworks which form the binary metal oxide system, is affected. In Hf:Si oxide samples photoconductivity thresholds of 5.6–5.9 eV corresponding to the bandgap of are observed for all studied Si concentrations, suggesting phase separation to occur. The photoconductivity of exhibits two thresholds at 4.4 and 5.7 eV, which are close to the bandgaps of elemental SrO and , respectively, indicating, again, phase separation. Through this work we have illustrated photoconductivity as a feasible method to trace phase separation in nanometer-thin layers of binary systems of metal oxides.
Keywords
This publication has 40 references indexed in Scilit:
- Investigation of hafnium-aluminate alloys in view of integration as interpoly dielectrics of future Flash memoriesSolid-State Electronics, 2007
- Band alignment in ultrathin Hf–Al–O∕Si interfacesApplied Physics Letters, 2005
- Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques comparedJournal of Microscopy, 2005
- Atomic structure, band offsets, growth and defects at high-K oxide:Si interfacesMicroelectronic Engineering, 2004
- Study of interfacial reaction and its impact on electric properties of Hf–Al–O high-k gate dielectric thin films grown on SiApplied Physics Letters, 2003
- Internal photoemission of electrons and holes from (100)Si into HfO2Applied Physics Letters, 2002
- Correlations between electronic structure of transition metal atoms and performance of high-k gate dielectrics in advanced Si devicesJournal of Non-Crystalline Solids, 2002
- Interfacial reaction between chemically vapor-deposited HfO2 thin films and a HF-cleaned Si substrate during film growth and postannealingApplied Physics Letters, 2002
- Thermal stability and electrical characteristics of ultrathin hafnium oxide gate dielectric reoxidized with rapid thermal annealingApplied Physics Letters, 2000
- Internal photoemission spectroscopy of semiconductor-insulator interfacesProgress in Surface Science, 1992