Characterization of hard amorphous carbon films implanted with nitrogen ions
- 1 January 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 80-81, 1464-1467
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Primary study on the irradiation effects of high energy C+ and H+ on diamond-like carbon filmsJournal of Applied Physics, 1992
- Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin filmsApplied Physics Letters, 1992
- Application of factor analysis to Auger crater-edge profilingJournal of Vacuum Science & Technology A, 1991
- Evaluation of the sp2/sp3 ratio in amorphous carbon structure by XPS and XAESApplied Surface Science, 1991
- Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-activeGandDbandsPhysical Review B, 1989
- Ion-induced depletion of hydrogen from a soft carbonized layerJournal of Applied Physics, 1989
- Low-Pressure, Metastable Growth of Diamond and "Diamondlike" PhasesScience, 1988