Structural, Optical, and Dielectric Properties of Reactively Sputtered Films in the System AlN–BN
Authors:
- A. J. NoreikaANA. J. Noreika
- M. H. FrancombeMFM. H. Francombe
- 1 July 1969
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 6 (4) , 722-726