Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films
Authors:
- K. EllmerKEK. Ellmer
- F. KudellaFKF. Kudella
- R. MientusRMR. Mientus
- R. SchieckRSR. Schieck
- S. FiechterSFS. Fiechter
- 1 July 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 247 (1) , 15-23
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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