Patterning of platinum (Pt) thin films by chemical wet etching in Aqua Regia
Authors:
- P A KöllenspergerPKP A Köllensperger
- W J KarlWKW J Karl
- M M AhmadMAM M Ahmad
- W T PikeWPW T Pike
- M GreenMGM Green
- 29 May 2012
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 22 (6)