Abstract
Silicon photonic biosensors can be fabricated via standard CMOS microfabrication techniques, with many sensing sites integrated on the same chip. In this work, we report the design and validation of a cascaded 1 × 4 racetrack-shaped microring resonator (rsMRR) based on silicon-on-insulator (SOI), optimizing key parameters, such as the waveguide width, coupling gap, and ring radius. Moreover, we comprehensively characterize the sensing performance of the rsMRR. The experimental results show that the resonator achieves a sensitivity of 117 nm/RIU within a glucose concentration range of 03.3 mg/mL. Compared with traditional structures, this design reduces optical loss through its racetrack-shaped layout, reaching a quality factor (Q-factor) of 510, and has advantages such as high integration density, anti-interference capability, and miniaturization. This work reveals the potential of silicon-based rsMRRs for practical glucose-sensing applications.
Funding Information
  • State Key Program of Natural Science Foundation of Tianjin (25JCZDJC00290)
  • National Natural Science Foundation of China (61177078)
  • National Natural Science Foundation of China (61675154)
  • National Natural Science Foundation of China (61711530652)

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