Energy saving of 42-pair Siemens reactor with different layouts for polysilicon production: Three rings and four rings
- 26 August 2024
- journal article
- research article
- Published by Elsevier in Materials Today Communications
- Vol. 40
Abstract
No abstract availableKeywords
Funding Information
- Major Science and Technology Projects in Yunnan Province (202202AB080014)
- National Natural Science Foundation of China (22168019, 52074141)
This publication has 14 references indexed in Scilit:
- Model on transport phenomena and control of rod growth uniformity in siemens CVD reactorComputers & Chemical Engineering, 2018
- Prediction of thermal and electrical behavior of silicon rod for a 48-rod Siemens reactor by direct current powerInternational Communications in Heat and Mass Transfer, 2017
- The combined effect of heat transfer and skin effect on Joule heating for silicon rod in Siemens reactorApplied Thermal Engineering, 2017
- Deposition reactors for solar grade silicon: A comparative thermal analysis of a Siemens reactor and a fluidized bed reactorJournal of Crystal Growth, 2015
- Heat losses in a CVD reactor for polysilicon production: Comprehensive model and experimental validationJournal of Crystal Growth, 2014
- Radiation heat savings in polysilicon production: Validation of results through a CVD laboratory prototypeJournal of Crystal Growth, 2013
- Recycling of SiCl4 in the manufacture of granular polysilicon in a fluidized bed reactorChemical Engineering Journal, 2013
- Exploring polysilicon deposition conditions through a laboratory CVD prototypephysica status solidi (c), 2012
- Radiative energy loss in a polysilicon CVD reactorSolar Energy Materials and Solar Cells, 2011
- New processes for the production of solar-grade polycrystalline silicon: A reviewSolar Energy Materials and Solar Cells, 2008