Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor > 1 million

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Abstract
Barium titanate (BTO) has been experiencing a surge of interest for integrated photonics technologies because of its large nonlinear optical coefficients, especially the Pockels coefficient, and in part due to newly available thin-film substrates. In this work, we report a redeposition-free dry etching process for monolithic BTO-on-insulator photonics that produces very low-roughness and high-verticality (≈ 60 o ) waveguides. Using this, we experimentally demonstrate the first, to the best of our knowledge, monolithic BTO-on-insulator microresonators with intrinsic quality factor ( Q i ) >1 million, representing the highest intrinsic quality factor reported in any BTO-based integrated platform to date. Waveguide propagation losses as low as 0.32 dB/cm are also reported. We additionally demonstrate Mach–Zehnder amplitude modulators with V π L =0.54 V⋅cm and effective electro-optic coefficient r eff =162 pm/V.
Funding Information
  • Defense Advanced Research Projects Agency (D24AC00003)
  • Office of Naval Research (N00014-20-1-2325)
  • Air Force Research Laboratory (FA9453-20-2-0001)

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