Mechanical property measurements of thin films using load-deflection of composite rectangular membranes
Authors:
- 1 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2) , 135-141
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988
- Novel microstructures for the i n s i t u measurement of mechanical properties of thin filmsJournal of Applied Physics, 1987
- Microfabricated structures for the i n s i t u measurement of residual stress, Young’s modulus, and ultimate strain of thin filmsApplied Physics Letters, 1987
- A simple technique for the determination of mechanical strain in thin films with applications to polysiliconJournal of Applied Physics, 1985
- A technique for the determination of stress in thin filmsJournal of Vacuum Science & Technology B, 1983
- Stress in polycrystalline and amorphous silicon thin filmsJournal of Applied Physics, 1983
- Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical propertiesSensors and Actuators, 1983
- Young’s modulus measurements of thin films using micromechanicsJournal of Applied Physics, 1979