Low-energy electron scattering cross sections of halofluorocarbons

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Abstract
The interaction of low‐energy electrons with halogenated methanes is important in both their atmospheric and plasma‐processing chemistry. In this work, the total electron scattering cross sections of mixed fluorohalomethanes (CF n X4−n ) were measured for incident electrons in the energy range of 0.3–12 eV using electron transmission spectroscopy.Resonances in the scattering cross sections may be interpreted as the capture of low‐energy electrons into unoccupied molecular orbitals. To aid in the assignments of the resulting negative ion states, we performed quantum‐mechanical calculations of the electron attachment energies. The effect of halogen substitution on the orbitals participating in electron capture are examined.

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