Modification of Ti-Al-N coatings by high energy (Cr+ + B+) ion bombardment

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Abstract
The effect of the bombardment by high-energy ions Cr+ and B+ on the structure and mechanical properties of TiAlN coatings is investigated. It is found that the wear resistance of coatings decreases by ∼9 times and the microhardness keeps the magnitude at the fluency 2 × 1017 sm−2. It is established by the X-ray analysis method that the amorphization of the surface layer of the coating occurs at the used modes of ionic processing. The secondary ion mass spectrometry and X-ray analysis show that this effect causes an amplification of destruction of the surface layer of the coating under ion bombardment due to the induced crystalline lattice amorphization.

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