Development of Integrated Multi-Station System to Precisely Detect and Mitigate Surface Damage on Fused Silica Optics
- 11 November 2020
- journal article
- research article
- Published by Springer Nature in International Journal of Precision Engineering and Manufacturing
- Vol. 22 (1) , 95-105
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (51705105, 51775147)
- Self-Planned Task of State Key Laboratory of Robotics and System (SKLRS201803B, SKLRS201718A)
- Fundamental Research Funds for the Central Universities (HIT.NSRIF. 2019053)
- Science Challenge Project (TZ2016006- 0503-01)
- Young Elite Scientists Sponsorship Program by CAST (2018QNRC001)
- China Postdoctoral Science Foundation (2018T110288, 2017M621260)
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